Auger Microprobe Analysis

MES offers several Auger microprobes for your compositional analysis, depth-profiling, and interface analysis needs.  Our Auger Electron Spectrometer (AES) will help you to investigate surface contaminants and examination of your thin films too thin for EDS analysis.  Auger provides surface-sensitive techniques that provide elemental analysis down to a single atomic layer.  

Applications of the Auger microprobes include the following:

• Analysis of surface contamination contributing to corrosion, wear, and oxidation
• In depth surface film, coating, and thin film analysis
• Analysis of grain boundary chemistry

Our primary electron beam testing instrumentation includes the following:

• JEOL 6100 Scanning Electron Microscope; INCA EDS 
• JEOL 6100 Scanning Electron Microscope; EDAX EDS
• JEOL 5800 Scanning Electron Microscope; Oxford EDS
• JEOL JXA-733 Superprobe with Wavelength Dispersive X-Ray (WDS)
• JEOL JSM-T330A Scanning Electron Microscope; PGT EDS
• JEOL JAMP 10 Scanning Auger Spectrograph
• JEOL JAMP 10S Scanning Auger Spectrograph